104 wph
throughput speed
Product
Canon FPA-3030i5+ Stepper
High-volume i-Line stepper for IoT1 and MEMS2 devices.
350 nm
image resolution quality
6-axis
non-contact wafer stage
Flexible
optical system and lens
Energy-efficient for environmentally conscious manufacturers
The Canon FPA-3030i5+ delivers long-term solutions for device manufacturers. Configured to support optional equipment, the stepper can accommodate specialist wafer materials, including silicon and sapphire.
Superior lens
Maintain 40 nm overlay accuracy, even with imaging resolution below 350nm.
Wide range
Wafer sizes range from 100mm to 200mm to meet precise productivity requirements.
Proven tech
Improved throughput thanks to modernised electrical control and focus systems.
Product Specifications
Wafer size
200 mm; 150 mm
Resolution
≤ 350 nm
Exposure area
22 mm x 22 mm
Overlay accuracy
≤ 40 nm
Reticle size
6 in.
Reduction ratio
5:1
Productivity
≥104 wafers per hour (200 mm)
≥120 wafers per hour (150 mm)
Develop your business’ environmental conscience with the Canon FPA-3030i5+
Related Products
FPA-5550iZ2
High resolution, wide-field i-Line stepper for large-field device imaging.
FPA-5510iX
High resolution, wide-field i-Line stepper for large-field device imaging.
FPA-5520iV
i-Line stepper supporting higher-integration-levels and thinner-package devices.
Support the future of your semiconductor manufacturing with Canon Industrial Products
1. IoT: Internet of Things
2. MEMS: An abbreviation of "Micro Electro Mechanical Systems" which are devices having micron-level mechanical structures such as collecting sensors and actuators that are integrated with electronic circuitry.
