SEMICONDUCTOR LITHOGRAPHY

KrF scanners

Technology for high performance semiconductor lithography.

KrF scanner functions - Canon FPA-6300ESW KrF scanner

FPA-6300ESW

The only wide-field KrF scanner in the world that can expose a full-size CMOS image sensor in one shot.

KrF scanner functions - Canon FPA-6300ES6a KrF scanner

FPA-6300ES6a

A sophisticated KrF scanner designed for high volume production, with high overlay accuracy and faster wafer handling.

IC manufacturing KrF scanner functions - Canon FPA-3030EX6 KrF scanner

FPA-3030EX6

KrF Stepper for IoT devices using substrates of varying material, sizes and thicknesses.

Related Products

KrF excimer laser function – Canon FPA-5550iZ2 KrF scanner

i-Line steppers

Wide range of FEOL and BEOL applications for semiconductor wafer processing.

Accelerate your processing performance with a Canon KrF scanner

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