Technology for high performance semiconductor lithography.
The only wide-field KrF scanner in the world that can expose a full-size CMOS image sensor in one shot.
A sophisticated KrF scanner designed for high volume production, with high overlay accuracy and faster wafer handling.
KrF Stepper for IoT devices using substrates of varying material, sizes and thicknesses.
Wide range of FEOL and BEOL applications for semiconductor wafer processing.