i-Line Lithograpy

Canon's i-Line Steppers are fully market-proven and offer a broad range of solutions up to and including full compatibility with Canon's field-convertible 200mm and 300mm scanners.


FPA-3030i5+

FPA-3030i5+

The FPA-3030 platform represents an upgrade to earlier Canon FPA-3000 platform steppers. The FPA-3030i5+ features an overhauled software structure and electrical control system that allow application of optional advanced hardware (e.g., projection lens, wafer stage, and alignment system) that is not compatible with traditional FPA-3000 platform steppers.

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Range:

FPA-3030i5+
FPA-5510iZ
FPA-5510iV
FPA-5550iZ
FPA-3000i5++