KrF Scanners and Steppers

Canon KrF Scanners and Steppers are performing a leading role in today's IC manufacturting processes, offering the true capability to extend 248 nanometer (nm) wavelength technology to 90nm in production and beyond.


FPA-6300ES6a

FPA-6300ES6a

Canon's new FPA-6300ES6a DUV scanner achieves high throughput and high-overlay accuracy to effectively respond to the advanced needs of chip manufacturers seeking reduced cost of ownership.

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Range:

FPA-6300ES6a
FPA-6000ES6a
FPA-6000ES5a